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Fabrication of Helically Perforated Thin Films

Published online by Cambridge University Press:  17 March 2011

K.D. Harris ,
K.L. Westra  and
M.J. Brett
K.D. Harris
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada, T6G-2G7
K.L. Westra
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada, T6G-2G7
M.J. Brett
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada, T6G-2G7
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Abstract

Using glancing angle deposition and templating techniques, we have fabricated a number of unique thin film microstructures. Engineered columnar thin films having the inverse of the desired structure (i.e., arrays of helices or chevrons) were first deposited by glancing angle deposition. These films were then filled with a solution of the desired material, and allowed to cure. The template material was then removed by chemical etching, leaving a perforated thin film. Such films have been produced of photoresist and spin-on-glass, on both silicon and glass substrates. The perforations have taken the form of chevrons and helices of large and small pitch, and have been arranged in both random and periodic (1μm spacing) arrays.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 636: Symposium D – Nonlithographic and Lithographic Methods of Nanofabrication-From Ultralarge Scale , 2000 , D9.37.1
Copyright
Copyright © Materials Research Society 2001

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