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Fabrication of Perforated Film Nanostructures

Published online by Cambridge University Press:  11 February 2011

A. L. Elias ,
K. D. Harris  and
M. J. Brett
A. L. Elias
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada T6G 2V4, aelias@ualberta.ca
K. D. Harris
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada T6G 2V4, aelias@ualberta.ca
M. J. Brett
Affiliation:
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, Canada T6G 2V4, aelias@ualberta.ca
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Abstract

We have demonstrated the fabrication of perforated thin films (PTFs), comprised of thin coatings perforated with unusual pore shapes such as helices or chevrons. PTFs are fabricated using a template of nanohelices or nanochevrons produced using the Glancing Angle Deposition (GLAD) technique. PTFs can be produced by filling GLAD films with a variety of substances, etching back the coating to reveal the tips of the helices or chevrons, and etching out the template film. A process for fabricating nickel PTFs has been developed, and a nickel PTF of helical pores with nominal diameters of 100nm has been produced.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 739: Symposium H – Three-Dimensional Nanoengineered Assemblies , 2002 , H8.5
Copyright
Copyright © Materials Research Society 2003

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References

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