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Femtosecond Laser-Induced Micro-Structuring of Thin a-Si:H Films

Published online by Cambridge University Press:  01 February 2011

Barada K. Nayak  and
Mool C. Gupta
Barada K. Nayak
Affiliation:
Applied Research Center, Old Dominion University, Newport News, Virginia 23606, USA
Mool C. Gupta
Affiliation:
Applied Research Center, Old Dominion University, Newport News, Virginia 23606, USA
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Abstract

In a-Si:H solar cells, light trapping has been sought as a method to enhance absorption and improve the efficiencies of these devices. Here we present results for surface texturing of 2μm thick a-Si:H films by 800 nm wavelength femtosecond laser. The texture led to a significant enhancement in optical absorption (80%) in visible through near IR (60%). The textured surface was examined by a scanning electron microscope (SEM) and atomic force microscope (AFM). The results indicated the formation of dense spikes with height of 65–75 nm. The samples were completely black after femtosecond laser treatment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 850: Symposium MM – Ultrafast Lasers for Materials Science , 2004 , MM1.8
Copyright
Copyright © Materials Research Society 2005

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References

REFERENCES

1. Rothenberg, J. E. and Kelly, R., Nucl. Instrum. Meth. Phys. Res. B 1, 291 (1984).Google Scholar
2. Ameer-Berg, S., Perrie, W., Rathbone, S., Wright, J., and Weaver, W., Appl. Surf. Sci. 127–129, 875 (1998).Google Scholar
3. Kautek, W. and Krueger, J., Materials Science Forum (Trans Tech Publications, Switzerland, 1995), Vol. 173–174, pp. 17–22.Google Scholar
4. Her, T. H., Finlay, R. J., Wu, C., Deliwala, S., and Mazur, E., Appl. Phys. Lett. 73, 1673–1675 (1998)Google Scholar
5. Wu, C., Crouch, C. H., Zhao, L., Carey, J. E., Younkin, R., Lenvinson, J. A., Farrell, R. M., Gothoskar, P., Karger, A., and Mazur, E. Appl. Phys. Lett. 78, 1850–1852 (2001)Google Scholar
6. Field Emission from Silicon Microstructures Formed by Femtosecond Laser Assisted Etching, L. Zhao, C. Wu, E. Mazur, C. H. Crouch and J. E. Carey CLEO 2001 (Baltimore, MD, 2001). 555–556.Google Scholar
7. Her, T.-H., Finlay, R. J., Wu, C., Mazur, E., Applied Phys.A. 70, 383–385 (2000).Google Scholar
8. Zanzucchi, P. J., Wronski, C. R., and Carlson, D. E., J. Appl. Phys. 48(12), 5227 (1977).Google Scholar
9. Wu, C., Crouch, C. H., Zhao, L., and Mazur, E., Appl. Phys. Lett. 81, 1999–2001 (2002).Google Scholar