Hostname: page-component-5c6d5d7d68-lvtdw Total loading time: 0 Render date: 2024-08-27T23:21:58.887Z Has data issue: false hasContentIssue false
  • English
  • Français

First Results from the Los Alamos Plasma Source Ion Implantation Experiment

Published online by Cambridge University Press:  22 February 2011

D. J. Rej ,
J. R. Conrad ,
R. J. Faehl ,
R. J. Gribble ,
I. Henins ,
N. Horswill ,
P. Kodali ,
M. Nastasi ,
W. A. Reass  and
M. Shamim
...Show all authors
D. J. Rej
Affiliation:
Los Alamos National Laboratory, MS-E526, Los Alamos, NM 87545
J. R. Conrad
Affiliation:
Univ. Wisconsin, Nuclear Engineering and Applied Physics Dept., Madison, WI 53706
R. J. Faehl
Affiliation:
Los Alamos National Laboratory, MS-E526, Los Alamos, NM 87545
R. J. Gribble
Affiliation:
Los Alamos National Laboratory, MS-E526, Los Alamos, NM 87545
I. Henins
Affiliation:
Los Alamos National Laboratory, MS-E526, Los Alamos, NM 87545
N. Horswill
Affiliation:
Univ. Wisconsin, Nuclear Engineering and Applied Physics Dept., Madison, WI 53706
P. Kodali
Affiliation:
Los Alamos National Laboratory, MS-E526, Los Alamos, NM 87545
M. Nastasi
Affiliation:
Los Alamos National Laboratory, MS-E526, Los Alamos, NM 87545
W. A. Reass
Affiliation:
Los Alamos National Laboratory, MS-E526, Los Alamos, NM 87545
M. Shamim
Affiliation:
Univ. Wisconsin, Nuclear Engineering and Applied Physics Dept., Madison, WI 53706
K. Sridharan
Affiliation:
Univ. Wisconsin, Nuclear Engineering and Applied Physics Dept., Madison, WI 53706
J. R. Tesmer
Affiliation:
Los Alamos National Laboratory, MS-E526, Los Alamos, NM 87545
K. C. Walter
Affiliation:
Los Alamos National Laboratory, MS-E526, Los Alamos, NM 87545
B. P. Wood
Affiliation:
Los Alamos National Laboratory, MS-E526, Los Alamos, NM 87545
Get access

Abstract

A new facility is operational at Los Alamos to examine plasma source ion implantation on a large scale. Large workpieces can be treated in a 1.5-m-diameter, 4.6-m-Jong plasma vacuum chamber. Primary emphasis is directed towards improving tribological properties of metal surfaces. First experiments have been performed at 40 kV with nitrogen plasmas. Both coupons and manufactured components, with surface areas up to 4 m2, have been processed. Composition and surface hardness of implanted materials are evaluated. Implant conformality and dose uniformity into practical geometries are estimated with multidimensional particle-in-cell computations of plasma electron and ion dynamics, and Monte Carlo simulations of ion transport in solids.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 316: Symposium A – Materials Synthesis and Processing Using Ion Beams , 1993 , 593
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Conrad, J., Radtke, J., Dodd, R.A., Worzala, F., Tran, N., J. Appl. Phys. 62, 4591 (1987).Google Scholar
2 Wood, B.P., Scheuer, J.T., Nastasi, M., Olsher, R.H., Reass, W.A., Henins, I., and Rej, D.J., in Beam Solid Interactions: Fundamentals and Applications, edited by Nastasi, M., Harriott, L.R., Herbots, N., and Averback, R.S. (Mater. Res. Soc. Proc. 279, Pittsburgh, PA, 1993), pp. 345–350.Google Scholar
3 Wood, B. P., Henins, I., Gribble, R.J., Reass, W.A., Faehl, R.J., Nastasi, M., and Rej, D.J., J. Vac. Sci. Tech. (in press).Google Scholar
4 Foster, L.A., Tesmer, J.R., Jervis, T.R., and Nastasi, M., Nucl. Instr. Meth. in Phys. Res. B79, 454 (1993).Google Scholar
5 The Profile Code™ is available from Implant Sciences Corp., Wakefield, MA 01880.Google Scholar
6 Rej, D.J., Conrad, J.R., and Mantese, J.V., Materials Technology 8 (5/6), 89 (1993).Google Scholar
7 Faehl, R.J., DeVolder, B., and Wood, B.P., J. Vac. Sci. Tech. (in press).Google Scholar