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Formation and Phase Transformation of R. F. Sputter Deposited NON-BCC 6-A15 Chromium Thin Films

Published online by Cambridge University Press:  10 February 2011

J. P. Chu ,
J. W. Chang ,
P. Y. Lee  and
J. K. Wu
J. P. Chu
Affiliation:
Institute of Materials Engineering, National Taiwan Ocean University, Keelung, Taiwan, R.O.C.
J. W. Chang
Affiliation:
Institute of Materials Engineering, National Taiwan Ocean University, Keelung, Taiwan, R.O.C.
P. Y. Lee
Affiliation:
Institute of Materials Engineering, National Taiwan Ocean University, Keelung, Taiwan, R.O.C.
J. K. Wu
Affiliation:
Institute of Materials Engineering, National Taiwan Ocean University, Keelung, Taiwan, R.O.C.
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Abstract

Formation and phase transformation of non-BCC δ-A15 Cr thin films prepared by R. F. magnetron sputtering have been characterized. Processing parameters such as working pressure, deposition time and temperature were found to affect the formation of δ-A15 Cr films. Using differential scanning calorimetry, we have demonstrated for the first time that the phase transformation of the δ-A15 Cr phase to the equilibrium c-BCC Cr phase is an irreversible, exothermic, first-order transition. At a heating rate of 10°C/min, the onset and peak temperatures of transformation were determined to be 428°C and 437°C, respectively. Our post-deposition annealing study by X-ray diffraction further verified the occurrence of transformation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 441: Thin Films – Structure and Morphology , 1996 , 347
Copyright
Copyright © Materials Research Society 1997

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