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Gas Phase Reactions in Horizontal MOCVD Reactors
Published online by Cambridge University Press: 25 February 2011
Abstract
We have applied kinetic simulation to MOCVD chemistry in a horizontal MOCVD reactor. Both chemical reactions and material diffusion are considered. For trimethylgallium decomposition, concentrations of chemical species reach their steady state values which differ largely from the equilibrium values.
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- Copyright © Materials Research Society 1987
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