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Grain Boundary Passivation in Polycrystalline Silicon : A D.L.T.S. Study
Published online by Cambridge University Press: 15 February 2011
Abstract
After treatment in a deuterium plasma, the D.L.T.S. spectrum associated with grain boundaries in p–type Si is found to reduce to a narrow band centered at 0.32 ± 0.02 eV with a total density of 5 ⨉ 1015 cm−2 . However, the capture cross-section, measured to be ∼ 2 × 10−20 cm2 , is 10 times larger than the apparent cross-section associated with the states present in unpassivated material.
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