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High Performance Vanadium Oxide Thin Film Electrodes for Rechargeable Lithium Batteries

Published online by Cambridge University Press:  10 February 2011

Ji-Guang Zhang ,
Ping Liu ,
C. Edwin Tracy ,
David K. Benson  and
John A. Turner
Ji-Guang Zhang
Affiliation:
National Renewable Energy Laboratory, Golden, CO 80401
Ping Liu
Affiliation:
National Renewable Energy Laboratory, Golden, CO 80401
C. Edwin Tracy
Affiliation:
National Renewable Energy Laboratory, Golden, CO 80401
David K. Benson
Affiliation:
National Renewable Energy Laboratory, Golden, CO 80401
John A. Turner
Affiliation:
National Renewable Energy Laboratory, Golden, CO 80401
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Abstract

Plasma Enhanced Chemical Vapor Deposition (PECVD) was used to prepare vanadium oxide thin films as cathodes for rechargeable lithium batteries. The reactants consisted of a high vapor pressure liquid source of vanadium (VOCl3) and hydrogen and oxygen gas. Deposition parameters such as the flow rates of H2, O2 and VOCl3, the substrate temperature and the Rf power were optimized, and high deposition rate of 11 Å/s was obtained. Vanadium oxide films with high discharge capacities of up to 408 mAh/g were prepared. The films also showed a superior cycling stability between 4 and 1.5 V at a C/0.2 rate for more than 4400 cycles. The films were amorphous up to a deposition temperature of 300°C, however, deposition on to substrates with textured surfaces facilitated the formation of crystalline films. We demonstrate that both the vanadium oxide material and the PECVD deposition method are very attractive for constructing thin-film rechargeable lithium batteries with high capacity and long-term cyclic stability.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 496: Symposium Y – Materials For Electrochemical Energy Storage & Conversion II… , 1997 , 379
Copyright
Copyright © Materials Research Society 1998

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References

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