A dielectric matrix, containing metal nanoparticles with interparticle spacings of 1–2 nm, is a system with tunnel mechanism of electrical conductivity. Its electrical resistance is very sensitive to deforming of matrix because it leads to changes in spaces between particles and as a result the potential barrier transperancy is varied.

Different metals (Mo, Cr, Ta, Au, Pt, Bi, Al) and their films morphology structure were studied in order to get high sensitive strain sensors. Metal nanoparticles were deposited on elastic dielectric substrates. Strain coefficients were measured for a wide range of strains and temperatures. Variation of matrix structure gives possibilities to produce strain sensors with high electrical resistance and weak temperature dependence. The matrix with Au nanoparticles was found to have maximum strain coefficient (>100). These sensors can be manufactured in the miniature scale (sensitive area around 1 micron or less).