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Hydrogen Neutralization of Chalcogen double donor Centers in Single-Crystal Silicon
Published online by Cambridge University Press: 26 February 2011
Abstract
Chalcogen (S,Se,Te) -doped silicon samples were hydrogen neutralized by different passivation techniques. The electrically active double-donor densities were determined by DLTS measurements. DLTS spectra reveal that both donor levels recover simultaneously. The activation energy for re-activation of neutralized isolated and pure pair sulphur double-donors is Ea(So/+) = 2,13 ± 0,15 eV and Ea(S2o/+) = 2,1 ± 0,15 eV, respectively.
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- Copyright © Materials Research Society 1988
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