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Hydrogenated Amorphous Carbon Deposition by Saddle-Field Glow Discharge

Published online by Cambridge University Press:  10 February 2011

S. Zukotynski ,
F. Gaspari ,
D. Manage ,
V. Pletnev  and
E. Sagnes
S. Zukotynski
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, Canada
F. Gaspari
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, Canada
D. Manage
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, Canada
V. Pletnev
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, Canada
E. Sagnes
Affiliation:
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, Canada
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Abstract

The saddle-field glow discharge is modeled and electron multiplication and energy spectra are presented. The roles of the ion substrate current and ion energy at the substrate on the growth rate, hydrogen content, sp2 content and energy gap are discussed and the effects of atmospheric aging and high temperature annealing are described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 593: Symposium U – Amorphous & Nanostructured Carbon , 1999 , 239
Copyright
Copyright © Materials Research Society 2000

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References

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