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Influence of Beam and Target Properties on the Excimer Laser Deposition of Yba2Cu3O7−x Thin Films

Published online by Cambridge University Press:  16 February 2011

S. R. Foltyn ,
R. E. Muenchausen ,
R. C. Estler ,
E. Peterson ,
W. B. Hutchinson ,
K. C. Ott ,
N. S. Nogar ,
K. M. Hubbard ,
R. C. Dye  and
X. D. Wu
S. R. Foltyn
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
R. E. Muenchausen
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
R. C. Estler
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
E. Peterson
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
W. B. Hutchinson
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
K. C. Ott
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
N. S. Nogar
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
K. M. Hubbard
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
R. C. Dye
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
X. D. Wu
Affiliation:
Los Alamos National Laboratory, Los Alamos, NM 87545
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Abstract

Target modification by excimer laser exposure has been investigated. Under conditions typical in the fabrication of superconducting thin films, deposition rate decreases with exposure and significant physical and chemical modifications occur on the target surface. These modifications do not inhibit congruent evaporation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 191: Symposium N – Laser Ablation for Materials Synthesis , 1990 , 205
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

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