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Kinetic Monte Carlo Simulations of Dislocation Etch-Pits

Published online by Cambridge University Press:  17 March 2011

Daniel N. Bentz
Affiliation:
Department of Materials Science and Engineering, University of Arizona 4715 E Fort Lowell Road Tucson, AZ 85712
Kenneth A. Jackson
Affiliation:
Department of Materials Science and Engineering, University of Arizona 4715 E Fort Lowell Road Tucson, AZ 85712
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Abstract

Chemical mechanical polishing and stress corrosion cracking result from chemical attack at stressed regions. To better understand the combined effects of chemical attack and stress, a kinetic Monte Carlo (kMC) study of the formation of dislocation etch pits is being pursued. In the simulations, atoms from a diamond cubic lattice are irreversibly removed with a probability which depends on an atom's number of nearrest neighbors as well the local stress developed from its physical location with respect to a dislocation in the lattice. In accordance with experimental observations, both faceted and non-faceted dislocation etch-pits have been observed. Simulations have been performed for various values of the strength to the etchant attack and the magnitude of the stress produced by the dislocation.

Type
Research Article
Copyright
Copyright © Materials Research Society 2002

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