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Laser Activated Glass Flow Modeling

Published online by Cambridge University Press:  28 February 2011

Sheldon Aronowit
Affiliation:
Fairchild Research Center, 4001 Miranda Avenue, Palo Alto, CA 94304
Michelangelo Delfino
Affiliation:
Fairchild Research Center, 4001 Miranda Avenue, Palo Alto, CA 94304
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Abstract

Laser induced flow of phosphosilicate glass, where the glass is a member of a multi-layer structure, was modeled with a one-dimensional coupled set of heat conduction and generation equations; the conventional approach was modified for explicit inclusion of non-ideal interfacial regions. There were no restrictions on the number or nature of material layers. Modeled behavior for 0.7 μm or 1 μm thick glass covering Al, or Si02, or Si agreed with observation; aluminum fusion accompanied by minimal glass flow when the AZ layer was covered by 0.7 μm glass was predicted and observed for the experimental laser pulse, as an example. Analysis also exposed the characteristics for successful laser generated glass flow; a rectangular pulse shape will permit the greatest control over the laser induced flow as well as provide the largest window for producing the desired flow while minimizing the effect on other material regions. Finally, experimental results with CW laser induced flow support the conclusion that the modeling successfully bridges four orders of magnitude in the thermal flux regime.

Type
Articles
Copyright
Copyright © Materials Research Society 1986

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References

1) Delfino, M. and Reifsteck, T. A., IEEE Electron Dev. Lett. EDL–3, 116 (1982).Google Scholar
2) Baeri, P., Campisano, S. U., Foti, G., and Rimini, E., J. Appl. Phys. 50, 788 (1979).Google Scholar
3) Carslaw, H. S. and Jaeger, J. C., Conduction of Heat in Solids, 2nd Ed. (Clarendon Press, Oxford, England, 1959) pg. 10.Google Scholar
4) Alexiades, V., Wilson, D. G., and Solomon, A. D., Quart. Appl. Math. XLIII, 143 (1985).CrossRefGoogle Scholar
5) Delfino, M., IEEE Electron Dev. Lett. EDL–4, 54 (1983).Google Scholar
6) Touloukian, Y. S., Ed., Thermophysical Properties of High Temperature Solid Materials, (MacMillan Company, New York, N.Y., 1967).Google Scholar
7) Kern, W., Kurylo, W. A., and Tino, C. J., RCA Rev. 46, 117 (1985).Google Scholar