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Layered Semiconductor Photoreflectance Diagnostics
Published online by Cambridge University Press: 22 February 2011
Abstract
We have investigated IR reflectance spectra of semiconductor structures consisting of up to 5 epitaxial GaAs/GaAlAs layers on GaAs wafer, diffused and implanted profiles in Si wafers to find the semiconductor structures parameters.
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- Copyright © Materials Research Society 1994