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Layered Semiconductor Photoreflectance Diagnostics

Published online by Cambridge University Press:  22 February 2011

Konstantin.O. Boltar  and
Valery.A. Fedirko
Konstantin.O. Boltar
Affiliation:
Moscow State University of Technology “Stankin”, Vadkovski per.3a, 101472, Moscow, Russia
Valery.A. Fedirko
Affiliation:
Moscow State University of Technology “Stankin”, Vadkovski per.3a, 101472, Moscow, Russia
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Abstract

We have investigated IR reflectance spectra of semiconductor structures consisting of up to 5 epitaxial GaAs/GaAlAs layers on GaAs wafer, diffused and implanted profiles in Si wafers to find the semiconductor structures parameters.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 324: Symposium K – Diagnostic Techniques for Semiconductor Materials Processing , 1993 , 175
Copyright
Copyright © Materials Research Society 1994

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References

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