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Local and Global Stress Distributions in BEOL Metallization

Published online by Cambridge University Press:  15 February 2011

I. C. Noyan ,
E. G. Liniger ,
C-K. Hu ,
P-C. Wang  and
G. S. Cargill III
I. C. Noyan
Affiliation:
IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, NY.
E. G. Liniger
Affiliation:
IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, NY.
C-K. Hu
Affiliation:
IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, NY.
P-C. Wang
Affiliation:
Dept. of Chem. Eng., Mat. Sci and Mining Eng., Columbia University, NY, NY.
G. S. Cargill III
Affiliation:
Dept. of Chem. Eng., Mat. Sci and Mining Eng., Columbia University, NY, NY.
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Abstract

Design of reliable thin film metallization is a complex problem that requires information about local parameters such as composition, microstructure, residual and loading stresses, etc. On the other hand, such information has been traditionally obtained using techniques that have sampling volumes that are appreciably larger than the BEOL dimensions currently in use. In this article, the x-ray residual stress analysis technique and its extensions to micro-domain measurements are reviewed. These concepts are then applied to strain data from in-situ x-ray measurements, obtained in real-time from Al metallization lines subjected to thermal stressing and electromigration.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 428: Symposium L – Materials Reliability in Microelectronics VI , 1996 , 565
Copyright
Copyright © Materials Research Society 1996

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