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Low Contact Resistivity Mn/Au/Ti/Pd/Au P-Ohmic Contacts for HBTs
Published online by Cambridge University Press: 22 February 2011
Abstract
Obtaining good p-ohmics to the base layers of AlGaAs/GaAs HBTs have been difficult due to metal spiking and instability of the contacts to subsequent processing temperatures. To avoid spiking, non-alloyed contacts have been traditionally used. In this paper, we present a stable, non-spiking, low contact resistivity alloyed p-ohmic contact to HBT structures.
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- Copyright © Materials Research Society 1993