Hostname: page-component-7479d7b7d-68ccn Total loading time: 0 Render date: 2024-07-11T02:17:49.905Z Has data issue: false hasContentIssue false

Manipulating InAs Dots with GaAs Patterns: Effect of GaAs Buffer Layer Growth and Pattern Profiles

Published online by Cambridge University Press:  10 February 2011

Søren Jeppesen
Affiliation:
Solid State Physics, Lund University, 221 00 Lund, Sweden
Maria Gerling
Affiliation:
Solid State Physics, Lund University, 221 00 Lund, Sweden
Lars Samuelson
Affiliation:
Solid State Physics, Lund University, 221 00 Lund, Sweden
Mark S. Miller
Affiliation:
Dept. of Electrical Engineering, Univ. of Virginia, Charlottesville, VA
Get access

Abstract

We report on our efforts to selectively place chemical beam epitaxy grown Stranski-Krastanov InAs dots on GaAs patterns. The pattern profiles for placement depends on the growth conditions of a GaAs buffer layer grown on the lithographic patterns. Because we seek to suppress dot formation on (100)-oriented surfaces outside of the features, we investigated the effects buffer layer growth conditions have on dot nucleation using reflected high energy electron diffraction, atomic force microscopy and photo-luminescence. We conclude that buffer conditions favorable for patterns have negligible effect on the dots formed on the (100)- oriented surface, and that selective dot placement can be engineered by As pressure, InAs deposition and buffer growth conditions.

Type
Research Article
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Goldstein, L., Glas, F., Marzin, J. Y., Charasse, M. N. and Roux, G. L., Appl. Phys. Lett. 47, 1099 (1985).10.1063/1.96342Google Scholar
2. Leonard, D., Pond, K. and Petroff, P. M., Phys. Rev. B 50, 11689 (1994).10.1103/PhysRevB.50.11687Google Scholar
3. Miller, M. S., Jap. J. Appl. Phys. 36,4123 (1997).10.1143/JJAP.36.4123Google Scholar
4. Mui, D. S. L., Leonard, D., Coldren, L. A. and Petroff, P. M., Appl. Phys. Lett. 66, 1620 (1995).10.1063/1.113871Google Scholar
5. Jeppesen, S., Miller, M. S., Hessman, D., Kowalski, B., I. Maximov and Samuelson, L., Appl. Phys. Lett. 68, 2228 (1996).10.1063/1.115867Google Scholar
6. Jeppesen, S., Miller, M. S., Kowalski, B., Maximov, I. and Samuelson, L., Superlattices and Microstructures 23, 1347 (1998).10.1006/spmi.1996.0428Google Scholar
7. Konkar, A., Madhukar, A. and Chen, P., Appl. Phys. Lett. 72, 220 (1998).10.1063/1.120691Google Scholar
8. Miller, M.S., Landin, L., Jeppesen, S., Petersson, A., Maximov, I., B. Kowalski and Samuelson, L., J. Cryst. Growth 175/176, 747 (1997).10.1016/S0022-0248(96)01219-5Google Scholar
9. Jeppesen, S., Gerling, M., Samuelson, L. and Miller, M. S., To be published in the proceedings from ICPS 24, August 1998.Google Scholar