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Measurement of Local Strain in Thin Aluminium Interconnects Using Convergent Beam Electron Diffraction (CBED)

Published online by Cambridge University Press:  10 February 2011

S. Krämer  and
J. Mayer
S. Krämer
Affiliation:
Max-Planck-Institut für Metallforschung, Seestr. 92, 70174 Stuttgart, Germany
J. Mayer
Affiliation:
now at Gemeinschaftslabor für Elektronenmikroskopie, RWTH Aachen, Ahornstr. 55, 52074 Aachen, Germany
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Abstract

Energy filtered convergent beam electron diffraction (CBED) was used to investigate localized strain in aluminium interconnects. An analysis of the higher order Laue zone (HOLZ) line positions in CBED patterns makes it possible to measure the lattice strain with high accuracy (∼10−4) and high spatial resolution (10 to 100 nm). The strain development in a single grain was measured during thermal cycling between −170°C and + 100°C. The grain showed reversible, elastic behaviour over the whole temperature range building up large strains at low temperatures. By comparing with finite element simulations, a detailed understanding of the tri-axial strain state could be achieved.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 594: Symposium V – Thin Films - Stresses & Mechanical Properties VIII , 1999 , 489
Copyright
Copyright © Materials Research Society 2000

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References

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