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Metal Surface Morphology Characterization Using Laser Scatterometry*
Published online by Cambridge University Press: 25 February 2011
Abstract
We have applied angle-resolved laser scatterometry to characterize the morphology of metals deposited under various conditions. Scatterometry is a rapid, noncontact and nondestructive diagnostic which yields surface statistics including rms roughness and power spectral density of the microstructure.
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- Copyright © Materials Research Society 1990
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Work supported in part by SEMATECH.
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