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A Method for Extracting Quantitative Data During in-situ TEM Nanoindentation

Published online by Cambridge University Press:  21 March 2011

A.M. Minor ,
E.T. Lilleodden ,
E.A. Stach  and
J.W. Morris
A.M. Minor
Affiliation:
Department of Materials Science & Engineering, University of California, Berkeley, CA
E.T. Lilleodden
Affiliation:
Materials Science Division, Lawrence Berkeley National Laboratory, Berkeley, CA
E.A. Stach
Affiliation:
National Center for Electron Microscopy, Lawrence Berkeley National Laboratory, Berkeley, CA.
J.W. Morris
Affiliation:
Department of Materials Science & Engineering, University of California, Berkeley, CA Materials Science Division, Lawrence Berkeley National Laboratory, Berkeley, CA
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Abstract

The development of a novel transmission electron microscope holder has made real time observations of nanoindentation possible. Using a piezo-ceramic loading mechanism, a diamond indenter is pushed into the surface of a sample, while the electron beam images the deforming sample in cross section. In this paper, we present the method for calibrating the force-displacement-voltage relation and load-frame compliance associated with this instrument. This allows quantitative force-displacement measurements to be obtained, in the manner of traditional indentation experiments. As an example of the utility of this technique, we present observations of the indentation behavior of an Al thin film on silicon, which have been previously shown [1]. Indentation into a coarse grain shows a displacement excursion corresponding to the nucleation of dislocations, and is compared to force-displacement responses measured with instrumented indentation techniques.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 695: Symposium L – Thin Films: Stresses and Mechanical Properties IX , 2001 , L4.4.1
Copyright
Copyright © Materials Research Society 2002

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References

REFERENCES

1. Minor, A.M., Morris, J.W. and Stach, E.A., Appl. Phys. Let. 79[11] (2001) 1625.Google Scholar
2. Gane, N. and Bowden, F.P., J. Appl. Phys. 39[3] (1968) 1432.Google Scholar
3. Wall, M. and Dahmen, U., Microsc. Microanal. 3 (1997) 593.Google Scholar
4. Stach, E.A., Freeman, T., Minor, A.M., Owen, D.K., Cumings, J., Wall, M., Chraska, T., Hull, R., Morris, J.W., Zettl, A. and Dahmen, U., Microsc. Microanal. 7[6] (2001) IN PRESS.Google Scholar
5. Lilleodden, E.T., Ph.D. Thesis, Stanford University (2001).Google Scholar
6. Gouldstone, A., Koh, H.-J., Zeng, K.-Y., Giannakopoulos, A.E., and Suresh, S., Acta Mater. 48 (2000) 2277.Google Scholar