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Microforming of Mems Parts with Amorphous Alloys

Published online by Cambridge University Press:  10 February 2011

Yasunori Saotome ,
Tao Zhang  and
Akihisa Inoue
Yasunori Saotome
Affiliation:
Dept of Mechanical Eng., Gunma University, Tenjincho 1–51, Kiryu, Gunma376–8515
Tao Zhang
Affiliation:
Inst. for Materials Research, Tohoku University, Katahira 2–11, Aoba, Sendai 980–8577, JAPAN.
Akihisa Inoue
Affiliation:
Inst. for Materials Research, Tohoku University, Katahira 2–11, Aoba, Sendai 980–8577, JAPAN.
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Abstract

Microformability of new amorphous alloys in the supercooled liquid state and microforming techniques for the materials are shown. In the supercooled liquid state, the materials reveal perfect Newtonian viscous flow characteristics and furthermore exhibit an excellent property of microformability on a submicron scale. As for microforming techniques, microforging and micro extrusion of amorphous alloys are introduced in addition to the fabrication method of micro dies of photochemically machinable glass. As a result, amorphous alloys are expected as one of the most useful materials to fabricate micromachines.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 554: Symposium MM – Bulk Metallic Glasses , 1998 , 385
Copyright
Copyright © Materials Research Society 1999

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