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A Molecular Approach to Ultrathin Multilayered Films of Titanium Dioxide

Published online by Cambridge University Press:  15 February 2011

Elaine R. Kleinfeld  and
Gregory S. Ferguson
Elaine R. Kleinfeld
Affiliation:
Department of Chemistry, Lehigh University, Bethlehem, PA 18015
Gregory S. Ferguson
Affiliation:
Department of Chemistry, Lehigh University, Bethlehem, PA 18015
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Abstract

We have used solution-phase inorganic chemistry to form ultrathin, covalently bonded layers of TiO2 on silicon wafers. Ellipsometry and x-ray photoelectron spectroscopy (XPS) were used to monitor the growth of the films. The ellipsometric thickness of the TiO2 films increased linearly with the number of reaction cycles, the first absorption cycle resulting in about 3–4 Å of growth, and subsequent cycles resulting in about 1 Å of growth. We attribute this limited growth to the limited number of reactive sites on the surface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 351: Symposium V – Molecularly Designed Ultrafine/Nanostructured Materials , 1994 , 419
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1. For reviews, see: Dubois, L.H. and Nuzzo, R.G., Annu. Rev. Phys. Chem. 43, 437 (1992); G.M. Whitesides and P.E. Laibinis, Langmuir 6, 87 (1990); A. Ulman, An Introduction to Ultrathin Organic Films: From Langmuir Blodgett to Self-Assembly (Academic, New York, 1991); G. Cao, H.-G. Hong, and T.E. Mallouk, Acc. Chem. Res. 25, 420 (1992).Google Scholar
2. Katz, H.E. and Schilling, M.L., Chem. Mater. 5, 1162 (1993).Google Scholar
3. Fischer, H.E., King, S.A., Miller, J.B., Ying, J.Y., Benziger, J.B., and Schwartz, J., Inorg. Chem. 30, 4403 (1991).Google Scholar
4. Srinivasan, S., Datye, A.K., Hampden-Smith, M., Wachs, I.E., Deo, G., Jehng, J.M., Turek, A.M., and Peden, C.H.F., J. Catal. 131, 260 (1991).Google Scholar
5. D'Anna, E., Giorgi, M.L. De, Luby, S., Luches, A., Majkova, E., and Martino, M., Thin Solid Films 228, 145 (1993).Google Scholar
6. Nakayama, T., J. Electrochem. Soc. 141, 237 (1994).Google Scholar
7. Lakomaa, E.-L., Haukka, S., and Suntola, T., Appl. Surf. Sci. 60/61, 742 (1992).Google Scholar
8. Haukka, S., Lakomaa, E.-L., Jylhd, C., Vilhunen, J., and Hornytzkyj, S., Langmuir 9, 3497 (1993).Google Scholar
9. Rausch, N. and Burte, E.P., J. Electrochem. Soc. 140, 145 (1993).Google Scholar
10. Asakura, K., Inukai, J., and Iwasawa, Y., J. Phys. Chem. 96, 829 (1992).Google Scholar
11. Jurek, K., Guglielmi, M., Kuncovd, G., Renner, C., Lukes, F., Navrdtil, M., Krousky, E., Vorlfcek, V., and Kokesova, K., J. Mat. Sci. 27, 2549 (1992).Google Scholar
12. Selvaraj, U., Prasadarao, A.V., Komameni, S., and Roy, R., J. Am. Ceram. Soc. 75, 1167 (1992).Google Scholar
13. Exarhos, G.J. and Hess, N.J. in Crystallization and Related Phenomena in Amorphous Materials, edited by Libera, M., Haynes, T.E., Cebe, P., and Dickinson, J.E. Jr., (Mater. Res. Soc. Proc. 321, 1994) p. 393.Google Scholar
14. Angst, D.L. and Simmons, G.W., Langmuir 7, 2236 (1991).Google Scholar
15. Rodgers, Glen E., Introduction to Coordination, Solid State, and Descriptive Inorganic Chemistry (McGraw-Hill, Inc., New York, 1994), p. 164.Google Scholar
16. Fadley, C.S., J. Electron Spect. Rel. Phenom. 5, 725 (1974).Google Scholar
17. Seah, M.P. and Dench, W.A., Surf. and Interface Anal. 1, 2 (1979).Google Scholar
18. Brunner, J. and Zogg, H., J. Electron Spect. Rel. Phenom. 5, 911 (1974).Google Scholar