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Molecular Dynamics Simulations of Hot Electrons and Lattice Relaxation in Realistic Cascade Volumes
Published online by Cambridge University Press: 26 February 2011
Abstract
This work presents a molecular dynamics simulation method designed to describe the processes of electron and lattice relaxation taking place in typical cascade volumes formed by high-energy implants. The simulation method is based on classical mechanics and includes the motions of electrons and nuclei. The results are in agreement with experiments.
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- Copyright © Materials Research Society 1992