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Morphology of Diamond Films Produced by ECR-PACVD

Published online by Cambridge University Press:  25 February 2011

S. Jin  and
T. D. Moustakas
S. Jin
Affiliation:
Department of Physics, Computer and Systems Engineering Boston University, Boston, MA 02215
T. D. Moustakas
Affiliation:
Department of Physics, Computer and Systems Engineering Boston University, Boston, MA 02215 Department of Electrical, Computer and Systems Engineering Boston University, Boston, MA 02215
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Abstract

Diamond films were produced at a relatively low pressures (<1 Torr) by the ECR-PACVD method of gas mixtures containing CO (5%), H2 (95%) and traces of oxygen at substrate temperatures from ambient (no intentional heating) to 1050°C. Faceted surface morphologies were observed even at the lowest temperature of growth. The microstructure is dominated by octahedral crystals below 600°C, by cubic crystals at 800–900°C, and by multiply twined (111) crystals at temperatures higher than 950°C. The weak temperature dependence of the growth rate is consistent with hydrogen abstraction from the growing surface being the rate controlling step.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 280: Symposium B – Evolution of Surface and Thin Film Microstructure , 1992 , 701
Copyright
Copyright © Materials Research Society 1993

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References

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