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Nanometer Scale Domain Measurement of Ferroelectric Thin Films Using Scanning Nonlinear Dielectric Microscopy

Published online by Cambridge University Press:  21 March 2011

Hiroyuki Odagawa ,
Kaori Matsuura  and
Yasuo Cho
Hiroyuki Odagawa
Affiliation:
Research Institute of Electrical Communication, Tohoku University, Sendai, 980-8577, Japan
Kaori Matsuura
Affiliation:
Research Institute of Electrical Communication, Tohoku University, Sendai, 980-8577, Japan
Yasuo Cho
Affiliation:
Research Institute of Electrical Communication, Tohoku University, Sendai, 980-8577, Japan
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Abstract

A very high-resolution scanning nonlinear dielectric microscope with nanometer resolution was developed for the observation of ferroelectric polarization. We demonstrate that the resolution of the microscope is of a sub-nanometer order by measurement of domains in PZT and SBT thin films. The experimental result shows that nano-sized 180° c-c ferroelectric domain with the width of 1.5 nm for PZT thin film are observed. The result also shows that the resolution of the microscope is less than 0.5 nm for the PZT thin film.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 655 , 2000 , CC7.4.1
Copyright
Copyright © Materials Research Society 2001

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References

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