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Nanometer-Scale Modification and Imaging of Polyimide Films by Scanning Force Microscopy

Published online by Cambridge University Press:  22 February 2011

W. N. Unertl  and
X. Jin
W. N. Unertl
Affiliation:
University of Maine, Orono, Maine 04469
X. Jin
Affiliation:
University of Maine, Orono, Maine 04469
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Abstract

The sharp tip of a scanning force microscope can be used to make controlled modifications of polymer surfaces. In this paper, we describe the properties of micrometer size pits up to 900 Å deep formed on Kapton-H surfaces. The structure at the bottom of the pits appears to be closely related to the degree of crystallinity near the surface. We also use elasticity theory to estimate that the resolution of scanning force microscopy for polymer surfaces is about 160 Å for tips with 400 Å radius. This estimate agrees well with the resolution obtained in images of polyimide surfaces.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 239: Symposium D – Thin Films: Stresses and Mechanical Properties III , 1991 , 535
Copyright
Copyright © Materials Research Society 1992

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References

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