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Nanopatterning and Nanomachining with Table-top Extreme Ultraviolet Lasers
Published online by Cambridge University Press: 01 February 2011
Abstract
Nanopatterning and nanomachining of PMMA coated wafers was performed using table top extreme ultraviolet lasers. Features below 100 nm were imprinted with short (50-60 s) exposure times.
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- Copyright © Materials Research Society 2007