Hostname: page-component-7479d7b7d-wxhwt Total loading time: 0 Render date: 2024-07-11T05:15:35.190Z Has data issue: false hasContentIssue false

Nano-wire field-effect transistor in etched ion tracks of flexible polymer foils

Published online by Cambridge University Press:  15 February 2011

Jie Chen
Affiliation:
Hahn-Meitner Institut Berlin, Glienicker Straβe 100, 14109 Berlin, Germany
S. Klaumünzer
Affiliation:
Hahn-Meitner Institut Berlin, Glienicker Straβe 100, 14109 Berlin, Germany
R. Könenkamp
Affiliation:
Physics Department, Portland State University, Portland, Oregon 97201, USA
Get access

Abstract

We have used irradiation by fast heavy ions and subsequent etching to prepare cylindrical channels in polymer/metal/polymer stacks. These channels were subsequently filled with insulator and semiconductor material, and then provided with suitable metallic contacts, to obtain a vertical field-effect transistor device. Preparation and first electronic results on this new device are reported. Typically 107 to 108 transistors per cm2 with a diameter of ∼100 nm can be obtained in this technique. The fabrication does not require lithography on the scale of a single transistor, and is suitable for large-area applications. The embedding in a soft polymer matrix results in a robust arrangement, whose electronic characteristics are largely insensitive to mechanical stress. At the present stage of development the smallest dimension of a single transistor grown by this technique is ∼50 nm. Further reduction of the device dimensions appears possible and, with it, observation of single electron effects in these devices.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

references

1. Gleskova, H., Wagner, S. and Suo, Z., Appl. Phys. Lett. 75, 3011 (1999)Google Scholar
2. Suo, Z., Ma, E.Y., Gleskova, H., and Wagner, S., Appl. Phys. Lett. 74, 1177 (1999)Google Scholar
3 Rost, C., Sieber, I., Siebentritt, S., Lux-Steiner, M.C., and Könenkamp, R., Appl. Phys. Lett. 75, 692 (1999)Google Scholar
4. Rost, C., diploma thesis, Physics Department, Freie Universität Berlin, Germany (1999)Google Scholar
5. Engelhardt, R. and Könenkamp, R., J. Appl. Phys. 90, 4287 (2001)Google Scholar
6. Sze, S.M., Semiconductor Devices (Physics and Technology), 2nd edition, Wiley (2002)Google Scholar
7. Apel, P.Y., Schulz, A., Spohr, R., Trautmann, C., and Vutsadakis, V., Nucl. Instrum. Meth. Phys. Res. B 130, 55 (1997)Google Scholar
8. Steckenreiter, T., Balanzat, E., Fuess, H., and Trautmann, C., J. Polym. Sci. A, Polym. Chem. 37, 4318 (1999)Google Scholar
9. Thurn-Albrecht, T., Schotter, J., Kästle, G.A., Emley, N., Shibauchi, T., Krusin-Elbaum, L., Guarini, K., Black, C.T., Tuominen, M.T., and Russel, T.P., Science 290, 2126 (2000)Google Scholar
10. Cepak, V.M. and Martin, C.R., Chem. Mater. 11, 1363 (1999)Google Scholar
11. Chen, J. and Könenkamp, R., Appl. Phys. Lett., in pressGoogle Scholar