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A Non-Reactive Excimer-Based Surface Preparation and Cleaning Tool for Broad-Based Industrial Applications
Published online by Cambridge University Press: 15 February 2011
Abstract
A surface-cleaning and preparation method that uses high-energy photons and a laminar flowing inert gas has been demonstrated as a feasible technology for broad-based industrial applications such as semiconductors, electronics, optics, coated optical and magnetic media, automotive, aerospace and art restoration. This technology is flexible in tool embodiment and is environmentally friendly because no water and chemicals are not used.
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- Copyright © Materials Research Society 1996
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