Hostname: page-component-745bb68f8f-b95js Total loading time: 0 Render date: 2025-01-15T11:16:19.686Z Has data issue: false hasContentIssue false
  • English
  • Français

A Novel Method to Determine The Mechanical Properties of Ultra-Thin Films.

Published online by Cambridge University Press:  10 February 2011

C. C. White  and
W. L. Wu
C. C. White
Affiliation:
National Institute of Standards and Technology, Polymers Division, Gaithersburg, MD 20899
W. L. Wu
Affiliation:
National Institute of Standards and Technology, Polymers Division, Gaithersburg, MD 20899
Get access

Abstract

Recent experimental results based on x-ray reflectivity[1, 2], and ellipsometry[3] have demonstrated that physical properties of polymer films thinner than one micron may deviate significantly from bulk values[4]. The mechanical properties of the ultra-thin films (sub-micron) are experimentally difficult to determine with precision. The quartz crystal microbalance is an established technique for measuring properties of polymer thin films of a few microns thick. [5–7] Recently this quartz crystal microbalance technique has been modified for measuring the mechanical properties of sub-micron polymer films with high precision. The details and preliminary results from this recently modified quartz crystal microbalance technique will be presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 511: Symposium E – Low Dielectric Constant Materials IV , 1998 , 177
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Wallace, W.E. & Wu, W.L. Appl. Phys. Lett. 67, 1203 (1995).Google Scholar
2. Wallace, W.E. Tan, N.C.B. Satija, S. & Wu, W.L. In Prep. (1997).Google Scholar
3. Forrest, J.A. Dalnoki-Veress, K. Stevens, J.R. & Dutcher, J.R. Phys. Rev.Lett. 77, 4108 (1996).Google Scholar
4. Frank, C.W. etal. Science 273, 912–915 (1996).Google Scholar
5. Buttry, D.A. & Deaking, M.R. Analytical Chemistry 61, 1147a (1989).Google Scholar
6. Johannsmann, D. Mathauer, K. Wegner, G. & Knoll, W. Physical ReviewB 46, 7808–7815 (1992).Google Scholar
7. Kanazawa, K.K. & Melroy, O.R. IBM Journal of Research and Developement 37, 157–171 (1993).Google Scholar
8. Mason, W.P. Piezoelectric Crystals and Their Application to Ultrasonics. (D. Van Nostrand Company, New York, 1950),Google Scholar
9. Mason, W.P. Physical Acousitcs and the Properties of Solids. (D. Van Nostrand Company, New York, 1958),Google Scholar
10. Ferry, J.D. Viscoelastic Properties of Polymers, (John Wiley and Sons, Inc., New York, 1980),Google Scholar
11. Crane, R.A. & Fischer, G. Journal Physics D: Applied Physics 12, 2019 (1979).Google Scholar
12. White, C.C. Ph.D., University of Wisconsin-Madison, 1994 Google Scholar
13. White, C.C. & Schrag, J.L. (In prep.).Google Scholar