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Optical and Electrical Properties of Cr-SiO Thin Films for Flat Panel Displays

Published online by Cambridge University Press:  21 March 2011

Richard Wood ,
Peter Hofstra  and
David Johnson
Richard Wood
Affiliation:
Luxell Technologies Inc. 5170A Timberlea Blvd Mississauga, CANADA, L4W 2S5
Peter Hofstra
Affiliation:
Luxell Technologies Inc. 5170A Timberlea Blvd Mississauga, CANADA, L4W 2S5
David Johnson
Affiliation:
Luxell Technologies Inc. 5170A Timberlea Blvd Mississauga, CANADA, L4W 2S5
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Abstract

Low temperature fabrication of transparent conducting materials is a key issue in flat panel display production. Though Cr-SiO cermet thin films have predominantly been used as thin film resistors in a variety of microelectronics applications, it is shown in this paper that the material can successfully be used as a transparent to semi-transparent conductor in some applications if the value of the extinction coefficient, k, can be kept low (<0.3). Thus, a detailed study of the interdependence of the resistivity and optical properties of Cr-SiO is presented for the first time within the context of its use in the flat panel display industry. Specifically, Cr-SiO can be employed as part of Luxell's optical interference structure, known as the Black Layer™, US patent 5,049,780, used to increase contrast in TFEL and OLED displays.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 667: Symposium G – Luminescence and Luminescent Materials , 2001 , G7.5
Copyright
Copyright © Materials Research Society 2001

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References

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