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The Origin of Luminescence From Cerium Oxide on Silicon

Published online by Cambridge University Press:  10 February 2011

Won Chel Choiv ,
Ho Nyung Lee ,
Yong Kim  and
Eun Kyu Kim
Won Chel Choiv
Affiliation:
Semiconductor Materials Laboratory, Korea Institute of Science and Technology, P.O.Box 131, Cheongryang, Seoul 130-650, Korea, cwc@kistmail.kist.re.kr
Ho Nyung Lee
Affiliation:
Semiconductor Materials Laboratory, Korea Institute of Science and Technology, P.O.Box 131, Cheongryang, Seoul 130-650, Korea
Yong Kim
Affiliation:
Department of Physics, College of Natural Sciences, DongA University, Hadan-2-Dong 840, Saha-gu, Pusan 604-714, Korea
Eun Kyu Kim
Affiliation:
Semiconductor Materials Laboratory, Korea Institute of Science and Technology, P.O.Box 131, Cheongryang, Seoul 130-650, Korea
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Abstract

As the ultra-violet/blue luminescent material, we will introduce the thermal treated cerium oxide on silicon. It has been confirmed a violet/blue luminescence ranging from 358 rim to 450 rnm at room temperature from the thermally treated cerium-dioxide thin films on silicon. As a results of AES and HR-TEM measurement, it was confirmed that cerium silicates were generated by thermal treatment. These cerium silicates such as Ce4.667(SiO4)3O and Ce2Si2O7 are the source of the ultra-violet (UV) emission ranging from 358 nim to 450 nm (maximum at 388 rim).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 560: Symposium E – Luminescent Materials , 1999 , 227
Copyright
Copyright © Materials Research Society 1999

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References

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