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A Package for Fast FEM-based Simulation of X-ray Diffraction From Nano-structures
Published online by Cambridge University Press: 31 January 2011
Abstract
In this work a novel package for the calculation of the diffracted intensity from nano-structures based on finite element simulations is presented. Besides a short introduction into the algorithm which we have developed two examples namely the diffraction from Si/SiGe systems with ripples and quantum dots with dislocations are shown.
- Type
- Research Article
- Information
- MRS Online Proceedings Library (OPL) , Volume 1228: Symposium KK – Nanoscale Pattern Formation , 2009 , 1228-KK01-08
- Copyright
- Copyright © Materials Research Society 2010