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Plasma Diagnostics During Pulsed Laser Deposition of Diamond-Like Carbon Using Single Crystal Graphite and Amorphous Carbon

Published online by Cambridge University Press:  10 February 2011

Y Yamagata ,
A. Sharma ,
J. Narayan ,
R. M. Mayo ,
J. W. Newman  and
K. Ebihara
Y Yamagata
Affiliation:
Dept. of Electrical and Computer Engineering, Kumamoto Univ., Kumamoto 860-8555, Japan
A. Sharma
Affiliation:
NSF Center for Advanced Materials and Smart Structures, Dept. of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695-7916
J. Narayan
Affiliation:
Dept. of Electrical and Computer Engineering, Kumamoto Univ., Kumamoto 860-8555, Japan
R. M. Mayo
Affiliation:
Dept. of Nuclear Engineering, North Carolina State University, Raleigh, NC 27695-7909
J. W. Newman
Affiliation:
Dept. of Nuclear Engineering, North Carolina State University, Raleigh, NC 27695-7909
K. Ebihara
Affiliation:
Dept. of Electrical and Computer Engineering, Kumamoto Univ., Kumamoto 860-8555, Japan
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Abstract

Optical emission study of ablation plasma plumes from single crystal graphite (SCG) and amorphous carbon (a-C) targets during the preparation of diamond-like carbon (DLC) films by KrF excimer pulsed laser deposition (PLD) has been investigated. The C I emission intensity increases with laser energy density (EL) increase, while the C2 emission changes drastically with EL for both ablated plasma plumes. The C2/C emission intensity ratio for the a-C plume decreases with EL increase, while the C2/C ratio for the SCG plume decreases with EL increase up to 3.0 J/cm2, then increases slightly with further EL increase Nanohardness of the DLC films decreases with the C2/C ratio increase. It is suggested that the C2 molecule in the plasma plume does not play an important role in producing high quality DLC films, and that the C2/C ratio is a good parameter to monitor the PLD process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 593: Symposium U – Amorphous & Nanostructured Carbon , 1999 , 255
Copyright
Copyright © Materials Research Society 2000

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References

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