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Polyimides for Passivation of VLSI Circuits

Published online by Cambridge University Press:  21 February 2011

Maarten A. van Andel  and
Wil F.M. Gootzen
Maarten A. van Andel
Affiliation:
Philips Research Laboratories, P.O. Box 80000, 5600 JA Eindhoven, The Netherlands
Wil F.M. Gootzen
Affiliation:
Philips Research Laboratories, P.O. Box 80000, 5600 JA Eindhoven, The Netherlands
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Abstract

From a processing point of view polyimides are attractive materials for use as interlayer dielectric and as passivation coating on ICs. For plastic encapsulated devices they can also improve on the thermomechanics, thereby enhancing yield and reliability. We simulated the thermomechanical behaviour of such a device with finite element calculations. Based on these simulations the commercial product PIQ-L100 was chosen as a model polyimide to study some important physical and chemical parameters. The results from investigating internal stress, molecular orientation and imidization kinetics can be used to optimize polyimide processing and to obtain the desired coating characteristics.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 154: Symposium K – Electronic Packaging Materials Science IV , 1989 , 183
Copyright
Copyright © Materials Research Society 1989

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References

Notes & References

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