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Preferential Crystallization of β-FeSi2 from Micro-droplets Generated by Laser Ablation.

Published online by Cambridge University Press:  01 February 2011

Aiko Narazaki ,
Tadatake Sato ,
Yoshizo Kawaguchi  and
Hiroyuki Niino
Aiko Narazaki
Affiliation:
Photonics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST) Central 5, 1–1–1 Higashi, Tsukuba, Ibaraki 305–8565, Japan
Tadatake Sato
Affiliation:
Photonics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST) Central 5, 1–1–1 Higashi, Tsukuba, Ibaraki 305–8565, Japan
Yoshizo Kawaguchi
Affiliation:
Photonics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST) Central 5, 1–1–1 Higashi, Tsukuba, Ibaraki 305–8565, Japan
Hiroyuki Niino
Affiliation:
Photonics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST) Central 5, 1–1–1 Higashi, Tsukuba, Ibaraki 305–8565, Japan
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Abstract

β-FeSi2 was successfully fabricated at room temperature via the deposition of molten micro-droplets generated by the KrF excimer laser ablation. Only the molten droplets precipitated as the β-FeSi2 crystalline phase on a silicon substrate kept even at room temperature, whereas the rest of film was amorphous. The crystallization behavior of micro-droplets has been discussed in the light of non-equilibrium process due to rapid cooling on the substrate. After the deposition, pulsed laser annealing was also performed in order to improve the crystallinity of the β-FeSi2 microprecipitates-containing film.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 848: Symposium FF – Solid-State Chemistry of Inorganic Materials V , 2004 , FF3.9
Copyright
Copyright © Materials Research Society 2005

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References

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