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Preferential Growth of Carbon Nanotubes/Nanofibers Using Lithographically Patterned Catalysts

Published online by Cambridge University Press:  21 March 2011

K. B. K. Teo ,
M. Chhowalla ,
G. A. J. Amaratunga ,
W. I. Milne ,
G. Pirio ,
P. Legagneux ,
F. Wycisk  and
D. Pribat
K. B. K. Teo
Affiliation:
Engineering Department, Cambridge University, Trumpington St, Cambridge CB2 1PZ, UK
M. Chhowalla
Affiliation:
Engineering Department, Cambridge University, Trumpington St, Cambridge CB2 1PZ, UK
G. A. J. Amaratunga
Affiliation:
Engineering Department, Cambridge University, Trumpington St, Cambridge CB2 1PZ, UK
W. I. Milne
Affiliation:
Engineering Department, Cambridge University, Trumpington St, Cambridge CB2 1PZ, UK
G. Pirio
Affiliation:
Thales Laboratoire Central de Recherches, Domaine de Corbeville, 91404 Orsay Cedex, France
P. Legagneux
Affiliation:
Thales Laboratoire Central de Recherches, Domaine de Corbeville, 91404 Orsay Cedex, France
F. Wycisk
Affiliation:
Thales Laboratoire Central de Recherches, Domaine de Corbeville, 91404 Orsay Cedex, France
D. Pribat
Affiliation:
Thales Laboratoire Central de Recherches, Domaine de Corbeville, 91404 Orsay Cedex, France
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Abstract

In order to utilise the full potential of carbon nanotubes/nanofibers, it is necessary to be able to synthesize well aligned nanotubes/nanofibres at desired locations on a substrate. This paper examines the preferential growth of aligned carbon nanofibres by PECVD using lithographically patterned catalysts. In the PECVD deposition process, amorphous carbon is deposited together with the nanotubes due to the plasma decomposition of the carbon feed gas, in this case, acetylene. The challenge is to uniformly nucleate nanotubes and reduce the unwanted amorphous carbon on both the patterned and unpatterned areas. An etching gas (ammonia) is thus also incorporated into the PECVD process and by appropriately balancing the acetylene to ammonia ratio, conditions are obtained where no unwanted amorphous carbon is deposited. In this paper, we demonstrate high yield, uniform, ‘clean’ and preferential growth of vertically aligned nanotubes using PECVD.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 675: Symposium W – Nanotubes, Fullerenes, Nanostructured and Disordered Carbon , 2001 , W9.1.1
Copyright
Copyright © Materials Research Society 2001

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References

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