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The Preparation of Some Silicon (OXY)Nitrides

Published online by Cambridge University Press:  25 February 2011

Peter W. Lednor  and
René De Ruiter
Peter W. Lednor
Affiliation:
Koninklijke/Shell-Laboratorium, Amsterdam (Shell Research B.V.), Badhuisweg 3, 1031 CM Amsterdam, The Netherlands.
René De Ruiter
Affiliation:
Koninklijke/Shell-Laboratorium, Amsterdam (Shell Research B.V.), Badhuisweg 3, 1031 CM Amsterdam, The Netherlands.
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Abstract

Various routes to silicon (oxy)nitrides are described, using both low-temperature solution chemistry and high temperature gas-solid reactions. The latter approach has led to a convenient synthesis of high-surface-area (e.g. 130 m g) silicon oxynitride, Si2N2O, from gaseous ammonia and commercially available, finely divided amorphous silica.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 121: Symposium H – Better Ceramics Through Chemistry III , 1988 , 497
Copyright
Copyright © Materials Research Society 1988

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References

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