Hostname: page-component-5c6d5d7d68-tdptf Total loading time: 0 Render date: 2024-08-15T00:30:16.515Z Has data issue: false hasContentIssue false
  • English
  • Français

Probe Rotating Atomic Force Microscopy for material characterization

Published online by Cambridge University Press:  14 July 2014

Sang Heon Lee
Sang Heon Lee*
Affiliation:
Dept. of Mechanical Design Engineering, Andong National University, Andong 760-749, Korea
Get access

Abstract

As the conventional atomic force microscopy (AFM) uses a Cartesian coordinate system to scan sample and the probe has different characteristics in each direction, it is impossible to scan in arbitrary direction. Therefore, we present the AFM which is able to rotate its probe. The deflection of cantilever was measured using optical pickup head of DVD drive. For verifying the system feasibility, the multidirectional scanning of the standard sample was carried out. Also we presented the modified structure which includes aligner and mirror to enhance the performance.

Keywords

scanning probe microscopy (SPM)lithography (removal)nano-indentation
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1712: Symposium ZZ/AAA/BBB – Recent Advances in the Structural Characterization of Materials , 2014 , mrss14-1712-bbb04-02
Copyright
Copyright © Materials Research Society 2014 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Binning, G., Quate, C., and Gerber, C., Phys. Rev. Lett. 56, 930 (1986).CrossRefGoogle Scholar
Quercioli, F., Tiribilli, B., Ascoli, C., Baschieri, P., and Frediani, C., Rev. Sci. Instrum. 70, 3620 (1999).CrossRefGoogle Scholar
Lee, S., Kim, H., and Jung, K., Int. J. Precis. Eng. Manuf. 12, 913 (2011).CrossRefGoogle Scholar
Lee, S. H., Rev. Sci. Instrum. 83, 113703 (2012).CrossRefGoogle Scholar
Hwu, E.-T., Illers, H., Wang, W.-M., Hwang, I.-S., Jusko, L. et al. ., Rev. Sci. Instrum. 83, 013703 (2012).CrossRefGoogle Scholar
Lee, S.H., Rev. Sci. Instrum. 85, 0333708 (2014).Google Scholar
Yong, Y K, Moheimani, S O R and R Petersen, I, Nanotechnology 21, 365503 (2010).CrossRefGoogle Scholar