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Processing of SiO2-TiO2 Thin Film Waveguides

Published online by Cambridge University Press:  28 February 2011

L. Weisenbach ,
T.L. Davis ,
B.J.J. Zelinski ,
R.L. Roncone  and
L.A. weller-Brophy
L. Weisenbach
Affiliation:
Arizona Materials Laboratories;
T.L. Davis
Affiliation:
Arizona Materials Laboratories;
B.J.J. Zelinski
Affiliation:
Arizona Materials Laboratories;
R.L. Roncone
Affiliation:
Optical Sciences Center;University of Arizona, Tucson,AZ 85721
L.A. weller-Brophy
Affiliation:
Optical Sciences Center;University of Arizona, Tucson,AZ 85721
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Abstract

The shrinkage behavior and changes in refractive index of sol-gel derived SiO2 -TiO2 thin films, with a composition of 50 mole %, were investigated. Two regions of shrinkage rate were observed, a rapid initial stage and a slower second stage. The refractive index of the film was found to be dependent upon the heat treatment. Samples prebaked to 100°C and processed at temperatures below 500°C were found to have lower indices than films processed without prebaking. Films heated to 700°C contained small crystallites of anatase uniformly distributed throughout the film.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 180: Symposium A – Better Ceramics Through Chemistry IV , 1990 , 377
Copyright
Copyright © Materials Research Society 1990

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References

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