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Production of Ultra-Thin Metal Films Using Neutral Cluster Beams

Published online by Cambridge University Press:  28 February 2011

A. Ramachandra
Affiliation:
Purdue University, School of Chemical Engineering, West Lafayette, IN 47907
M. Vaziri
Affiliation:
Purdue University, Department of Physics, West Lafayette, IN 47907
R.P. Andres
Affiliation:
Purdue University, Department of Physics, West Lafayette, IN 47907
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Abstract

Gold clusters (diam. = 1.0 ± .5 nm) are prepared in a gas aggregation source (MECS), expanded into a vacuum chamber to form a neutral cluster beam, and deposited at low impact velocity on room temperature substrates. When several monolayers of these clusters are deposited on clean substrates (nitrocellulose, glass, mica, NaCl), they form smooth ultra-thin films. These cluster-assembled films appear to be similar in quality to those produced by the Takagi-Yamada ion cluster beam process. They exhibit finite electrical conductivity at thicknesses much smaller than is the case with atomically evaporated films. They are extremely uniform and smooth with a surface height that typically varies less than 1 nm across the entire film.

Type
Research Article
Copyright
Copyright © Materials Research Society 1991

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References

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