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Pulsed Ion Beam Interface Melting of Ptcr and Crta Alloys on Si Structures
Published online by Cambridge University Press: 15 February 2011
Abstract
Composition profiles of thermal and pulsed ion beam annealed PtCr/Si and CrTa/Si have been determined using Rutherford backscattering analysis. Thermal annealing resulted in layered phase separation with Pt-silicide in the PtCr/Si case, and CrSi 2 in the CrTa/Si case, forming at the Si surface. Pulsed ion beam annealing, 300–380 keV protons at energy densities ~0.75–1.6 J/cm2 , produced interface melting with no layered phase separation.
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- Copyright © Materials Research Society 1983
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