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Pulsed Laser Deposition of ZnO Thin Films for Piezoelectric Applications

Published online by Cambridge University Press:  16 February 2011

E.P. Donovan ,
J.S. Horwitz ,
C.A. Carosella ,
R.C.Y. Auyeung ,
D.B. Chrisey  and
J.G. Smits
E.P. Donovan
Affiliation:
Naval Research Laboratory, Code 6672, Surface Modification Branch, 4555 Overlook Ave SW, Washington, D.C. 20375-5345
J.S. Horwitz
Affiliation:
Naval Research Laboratory, Code 6672, Surface Modification Branch, 4555 Overlook Ave SW, Washington, D.C. 20375-5345
C.A. Carosella
Affiliation:
Naval Research Laboratory, Code 6672, Surface Modification Branch, 4555 Overlook Ave SW, Washington, D.C. 20375-5345
R.C.Y. Auyeung
Affiliation:
Sachs Freeman Associates, 1401 McCormick Dr., Landover, MD 20785
D.B. Chrisey
Affiliation:
Naval Research Laboratory, Code 6672, Surface Modification Branch, 4555 Overlook Ave SW, Washington, D.C. 20375-5345
J.G. Smits
Affiliation:
Boston University, Department of Electrical Engineering, 44 Cumming St., Boston MA 02215
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Abstract

Transparent, insulating ZnO thin films have been deposited in-situ by pulsed laser deposition (PLD) from sintered targets. Films were deposited on substrates of fused quartz, <0001> A12O3, polycrystalline and textured (111) Au, at several substrate deposition temperatures (TSubstrate ≤ 700° C) and background oxygen pressures (P ≤ 300 mTorr). Film structure, morphology and electrical properties were characterized by X-ray diffraction, Rutherford backscattering spectrometry, optical properties were characterized by infrared transmission and reflection, and electrical resistivity was measured normal to the films. Films were crystalline, phase pure, and c-axis oriented. ZnO films deposited onto fused quartz and <0001> sapphire showed x-ray rocking curve full width at half maxima of 5° and 0.34°, respectively. The structure of ZnO films deposited on (111) textured Au was sensitive to the degree of texturing in the Au. The resistivity of PLD ZnO films was 61-63 kΩcm which was a factor of three improvement over sputter deposited films. Deposition of Au by both PLD and IBAD showed a negative correlation between the crystalline texturing and film adherence.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 360 , 1994 , 395
Copyright
Copyright © Materials Research Society 1995

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References

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