We have developed general algorithms for interpreting X-ray fluorescence data from single and multilayer metal films to yield precise values for both thickness and composition. As an example, the precision for replicate analyses of a Permalloy sample was measured to be 0.07 weight % Ni (1σ). The thickness was measured to be 1.387 ± 0.005 microns, a 1σ precision of 0.3% relative. Several examples will be presented.

The fundamental parameter algorithms are quite general and are capable of dealing with variable compositions in each of the films in a multilayer stack. The only restrictions are that: 1) Each element analyzed must appear only once in the films or substrate, and 2) The signal from each element is not obscured by that of another element. The accuracy and precision of the measurement is improved if a substrate signal is observed.