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Reel-to- Reel Cassette Cluster Tool System for Thin Film Transistor and Four Terminal Solar Cell Fabrication

Published online by Cambridge University Press:  17 March 2011

Arun Madan
Arun Madan*
Affiliation:
MVSystems, Inc., 17301 W. Colfax Ave., Suite 305, Golden, CO 80401, USA. Email: ArunMadan@aol.com www.mvsystems.info
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Abstract

We present a new type of system architecture to fabricate thin film silicon devices on flexible substrates, which uses the inherent advantages of a cluster tool normally used in the production of amorphous silicon thin film transistors, solar cells, etc. In this, the flexible substrate material is contained within a cassette which includes a reel to reel operation. As in the current cluster tools used for planar substrates, the cassette is transported to a process chamber using a robotic arm. When the entire roll in the cassette has been processed, it is transported into other chambers for further processing. We also show that a four terminal device structure (e.g. amorphous Si and stable low band gap nano-crystalline Si cells) potentially can lead to high efficiency (>15%), stable, low cost solar cells on a plastic substrate. Lastly we discuss the use of a pulsed PECVD deposition technique, which allows that the structure of the nano-crystalline Si films can be altered from 111 to 220 in a controllable way at a low temperature of <170C.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 814: Symposium I – Flexible Electronics 2004-Materials and Device Technology , 2004 , I2.9/A3.9
Copyright
Copyright © Materials Research Society 2004

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References

1. Fujikake, S., Tabuchi, K., Yoshida, T., Ichikawa, Y., Sakai, H., MRS Proc. 377, 609, 1995: Y.Ichikawa, S. Fujikake, K. Tabuchi, T.Sasaki, T.Hama, T. Yoshida, H. Sakai, M.Saga, MRS Proc. 557, 703, 1999.Google Scholar
2. Demaggio, G., Doehler, J., Elliosn, T., Izu, M., Jones, S., Karn, J., Kopf, R., Lycette, M., Messing, W., Ovshinsky, H., Ovshinsky, S., Banerjee, A., Call, J., Chan, W., Dio, G., Guha, S., Hoffma, K., Liu, R., Nam, P., Yang, J., NCPV Review Meeting, Denver, March 2003. To be published in AIP.Google Scholar
3. US patent #6,258,408B1: Semiconductor Vacuum Deposition System and Method having a Reel to Reel Substrate Cassette.Google Scholar
4. See for instance, “Physics and Applications of Amorphous Semiconductor Devices” by Madan, A., Shaw, M., Academic Press, 1988.Google Scholar
5. Kuwano, Y., Ohnishi, M., Nishikawa, H., Tsuda, S., Nakano, S., Proc. 15th IEEE Photovoltiac Conference, Florida, p 698, 1981.Google Scholar
6. Scholz, M., Bohm, M., Proceedings of the 16th European Photovolatic Conference, Glasgow, UK, p609, 2000.Google Scholar
7. Sazanov, A., Nathan, A., J.Non. Cryst. Solids, 266–269, 1329, 2000.Google Scholar
8. Yang, J., Guha, S., MRS Proc., 557, 239, 1999.Google Scholar
9. Staebler, D. L., and Wronski, C. R., Appl. Phys. Lett. 31, 292,1977.Google Scholar
10. Yang, J., and Guha, S., Appl. Physics Letters 70, 2975, 1997.Google Scholar
11. Yamamoto, K., Yoshimi, M., Suzuki, T., Nakata, T., Sawada, T., Nakajima, A., and Hayashi, K., IEEE PV conference, p. 1428, 2000.Google Scholar
12. Meier, J., Fluckiger, R., Keppner, H. and Shah, A., Appl. Phys. Lett. 65, 860, 1994.Google Scholar
13. Meier, J. et al. , Proc. MRS, 507, 131, 1996.Google Scholar
14. Madan, A., patent pending.Google Scholar
15. Coates, K., Morrison, S., Narayanan, S. and Madan, A., Proceedings of the 16th Europena Photovolatic Conference, Glasgow, UK, p1279, 2000.Google Scholar
16. Jamali-Beh, T., Chen, S., Liu, H., Lee, Y and Wronski, C.R., MRS Proc. 377, 627 (1995).Google Scholar
17. Hack, M., McGill, J., Czubatyj, W., Singh, R., Shur, M. and Madan, A., J. Appl. Phys. 53, 6270, 1982.Google Scholar
18. Das, U., Morrison, S., Centurioni, E., and Madan, A., IEE Proc.-Circuits Devices Syst., 150, 282, 2003.Google Scholar
19. Kamei, T., Wada, T., Matsuda, A., '28th IEEE Photovoltaic Spec. Conf., Anchorage, USA, pp. 784–787, 2000.Google Scholar
20. Nasuno, Y., Kondo, M. Matsuda, M.A., Appl. Phys. Lett., 78, 2330, 2001 Google Scholar
21. Chen, Y., Wagner, S., Appl.Phys Lett. 75,1125, 1999: M. Mulato, Y.Chen, S.Wagner, A.R.Zanatta, J.Non Cryst. Solids, 266-269, 1260, 2000.Google Scholar
22. Cheng, I-Chun, Wagner, S., Bae, S., Fonash, S.J., 664, A26.1.1, 2001.Google Scholar
23. Nasuno, Y., Kondo, M. Matsuda, M. A., 28th IEEE Photovoltaic Spec. Conf., Anchorage, USA, pp. 142, 2000.Google Scholar
24. Roschek, T., Repmann, T., Kluth, O., Müller, J., Rech, B., Wagner, H. H, , MRS Proc., 664, pp. A4.3.1, 2002 Google Scholar
25. Shah, A., Meier, J., Torres, P., Kroll, U., Fischer, D., Beck, N., Wyrsch, N., Keppner, H, 26th IEEE Photovoltaic Spec. Conf., Anaheim, USA, pp. 569–574, 1997.Google Scholar
26. Jones, S., Crucet, R., Izu, M., 28th IEEE Photovoltaic Spec. Conf., Anchorage, USA, pp. 134–137, 2000 Google Scholar
27. Klein, S., Finger, F., Carius, R., Rech, B., Houben, L., Luysberg, M., Stutzmann, M. M, , Mat. Res. Soc. Symp. Proc., 664, pp. A4.3.1–A4.3.12, 2002 Google Scholar
28. Meier, J., Vallat-Sauvain, E., Dubail, S., Kroll, U., Dubail, J., Golay, S., Feitknecht, L., Torres, P., Fay, S., Fischer, D., Shah, A., Solar Energy Materials & Solar Cells, 66, pp. 73–84, 2001.Google Scholar
29. Madan, A., patent pending.Google Scholar