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Rheed Studies of a-Axis Oriented DyBa2Cu3O7 Films Grown by All-MBE

Published online by Cambridge University Press:  10 February 2011

Ivan Bozovic ,
J. N. Eckstein ,
Natasha Bozovic  and
J. O'Donnell
Ivan Bozovic
Affiliation:
Varian Research Center, Palo Alto, CA 94304-1025
J. N. Eckstein
Affiliation:
Varian Research Center, Palo Alto, CA 94304-1025 Department of Physics, University of Illinois, Urbana-Champaign, IL 61801
Natasha Bozovic
Affiliation:
Department of Mathematics and Computer Science, San Jose State University, San Jose, CA 95192
J. O'Donnell
Affiliation:
Department of Physics, University of Illinois, Urbana-Champaign, IL 61801
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Abstract

Real-time, in-situ surface monitoring by reflection high-energy electron diffraction (RHEED) has been the key enabling component of atomic-layer-by-layer molecular beam epitaxy (ALL-MBE) of complex oxides. RHEED patterns contain information on crystallographic arrangements and long range order on the surface; this can be made quantitative with help of numerical simulations. The dynamics of RHEED patterns and intensities reveal a variety of phenomena such as nucleation and dissolution of secondary-phase precipitates, switching between growth modes (layer-by-layer, step-flow), surface phase transitions (surface reconstruction, roughening, and even phase transitions induced by the electron beam itself), etc. Some of these phenomena are illustrated here, using as a case study our recent growth of atomically smooth a-axis oriented DyBa2Cu3O7 films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 502: Symposium II – In Situ Process Diagnostics & Intelligent Materials Processing , 1997 , 221
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

1. Eckstein, J. N. et al, MRS Bulletin 18 (8), 27 (1993); ibid., 19 (9), 44 (1994); J. N. Eckstein and I. Bozovic, Ann. Rev. Mater. Sci. 25, 679 (1995).Google Scholar
2. Bozovic, I., Eckstein, J. N., and Virshup, G. F., Physica C 235–240, 178 (1994); I. Bozovic and J. N. Eckstein, J. Alloys and Compounds 251, 201 (1997).Google Scholar
3. For a nice general introduction to RHEED, see Lagally, M. G. and Savage, D. E., MRS Bulletin 18 (1), 24 (1993). For application to oxides, see also I. Bozovic and J. N. Eckstein, MRS Bulletin 20 (5), 32 (1995).Google Scholar
4. Chaiken, A. et al, J. Mater. Res. 11, 1609 (1996).Google Scholar
5. See, for example, Eom, C. B. et al, Science 249, 1549 (1990), ibid., 251, 780 (1991); J. B. Barmer et al, Appl. Phys. Lett. 59, 742 (1991), T. Hashimoto et al, ibid., 60, 1756 (1992), T. Umezawa et al, ibid., 63, 1993 (1993); H. Takahashi et al, Physica C, 179, 291 (1991), ibid., 201, 273 (1992); Y. Suzuki et al, Phys. Rev. B 48, 10642 (1993), Phys. Rev. Lett. 73, 328 (1994).Google Scholar
6. Borman, R. and Nölting, J., Appl. Phys. Lett. 54, 2148 (1989); V. Matijasevic et al, J. Mater. Res. 6, 682 (1991).Google Scholar