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Roughness Characterization by Optical Spectroscopy of CoSi2 Thin Films
Published online by Cambridge University Press: 15 February 2011
Abstract
Specular and diffuse reflectance and spectroscopic ellipsometry were used to characterize a series of Cosi2 films obtained by heat treatment on a Co/Ti bilayer. The surface quality is strongly affected by etching procedures. The intrinsic optical properties of the CoSi2 film exhibit a small dependence on the growth technique.
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- Copyright © Materials Research Society 1997