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Selective Nucleation of Single Crystal CVD Diamond and its Applicability to Semiconductor Devices
Published online by Cambridge University Press: 26 February 2011
Abstract
Using selective nucleation at edges or corners of μ m-size dots of Si, periodically arrayed diamond particles have been reproducibly fabricated. The particles are grown from single nuclei and have nearly-single crystal features. The properties of the diamond arrays compared with polycrystalline films have been investigated using cathodoluminescence and Schottky diodes.
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- Copyright © Materials Research Society 1990
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