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Sensitive, Selective, & Tunable Porous Silicon Gas Sensor

Published online by Cambridge University Press:  01 February 2011

Stephen Lewis ,
James Gole  and
Peter J. Hesketh
Stephen Lewis
Affiliation:
School of Physics, Georgia Institute of Technology, Atlanta, GA 30332
James Gole
Affiliation:
School of Physics, Georgia Institute of Technology, Atlanta, GA 30332
Peter J. Hesketh
Affiliation:
School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332
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Abstract

Hybrid porous silicon, consisting of a microporous framework whose walls are covered with a thin nanoporous layer, proves to be an inexpensive and robust platform for fabrication of rapid, reversible, and sensitive semiconductor sensors. An extremely high surface area provides a mechanism for the detection of ppm and ppb levels of a range of gases including ammonia, NOx, and CO. A general method of coating electroless metal onto the surface provides a basis for nanostructure induced selectivity between these gases. Further, the introduction of FFT analysis to the rapidly reversible and linear response of the porous silicon gas sensor allows the gas response to be acquired and filtered on a drifting baseline.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 828: Symposium A – Semiconductor Materials for Sensing , 2004 , A1.7
Copyright
Copyright © Materials Research Society 2005

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References

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